Applied Science Flow & Pressure Control

Applied Science — Flow & Pressure Control Solutions (UK)

The Applied Science group brings together high precision flow and pressure technologies for R&D lines, OEM tools and production environments. Typical requirements include VCR® face seal fittings, 316L stainless steel wetted paths, high purity/reactive gases and industrial fieldbuses—with strong EMC performance around high energy equipment. Our portfolio covers the full spectrum from sub sccm gas control to high flow back pressure regulation across Nanotechnology, Semiconductor, Glass, Optical Fibre, Surface Treatment, Laser and Vacuum applications.

Alicat — mass flow measurement & control + electronic pressure control

MC series MFCs - Multi gas, 50–100ms control response, 10,000:1 turndown; control by mass flow, volumetric flow or pressure on one device. Ideal for ALD/CVD steps, gas mixing, resonators and beam path purge
PC series pressure controllers - Fast, stable gauge/absolute/differential control (±0.125% FS), single or dual valve options for line, chamber, back pressure or vacuum regulation.
MCV vacuum MFCs - VCR® connections and helium tight positive shut off for vacuum integrity in coaters and resonators.
Vacuum integration - Drop in upgrades and fieldbus options for vacuum coating lines.

Equilibar — back pressure & vacuum regulation (frictionless, multi orifice)

EVR precision vacuum regulators for centralised vacuum and chamber back pressure with very low hysteresis.
General Service (GSD) for gas/liquid/mixed phase back pressure (¼"–1"); BD Industrial for larger lines (1½"–4").
High Temperature (HT) trims near hot zones; Research Series for micro flow & low dead volume lab rigs.

Drastar — UHP & high flow pressure regulation and automatic changeover

DRA100 / DRA200 (UHP, VCR®): 316L SS, electropolished options, low droop—provide clean, stable MFC inlet pressure for reactive/pure gases
DR70 (high flow/high pressure) and DR90 (DI water/low pressure) for assist gas headers, utility lines and plant purges
AC700/AC720 automatic changeover for uninterrupted supply to critical tools and resonators

Fluid Metering — valveless ceramic piston pumps for pulseless liquid dosing

QV variable speed drives + Q series heads: drift free feeds for precursors, primers, binders and coatings (µL/min → L/min).
RHV/RHB low flow pumps for lab lines, colour/additive dosing and process development.
Range overview with performance advantages and modular options.

Where these fit — examples by sub industry

Nanotechnology

Challenge: sub sccm precursor dosing & pulsed ALD under vacuum; back pressure swings during pump/purge.
Fit: Alicat MC and Alicat MCV for fast, stable pulses; Alicat PC to stabilise chamber pressure; Equilibar GSD and Equilibar EVR for exhaust/back pressure; Drastar UHP upstream regulation for dopant purity. (See our Nanotechnology overview.)

Semiconductor

Challenge: multi gas process control, vacuum compatibility, EtherCAT integration.
Fit: Alicat MFCs/PCs with vacuum & fieldbus options; Equilibar for mixed phase back pressure in exhaust/abatement; Drastar for gas cabinets and hook ups.

Glass Production

Challenge: stable O₂/fuel ratio, tin bath shield gases, APCVD coating uniformity.
Fit: Alicat MFCs/PCs for combustion and coating gas; Equilibar BPRs for coating back pressure; Drastar UHP regulators for H₂/N₂ supply quality.

Optical Fibre Production

Challenge: stable helium draw tower flows, MCVD gas dosing, coating head pressure.
Fit: Alicat MFCs/PCs for MCVD and draw; Equilibar for coating back pressure; Drastar UHP regulation for O₂/Cl₂/He supply.

Surface Treatment (plasma, CVD/APCVD, thermal spray, plasma polymerisation, paint)

Challenge: pulsed precursor feeds, exhaust stability at low flow, mixed phase behaviour.
Fit: Fluid Metering valveless piston pumps for pulseless coating feeds; Alicat MFCs/PCs for gas delivery and pressure; Equilibar HT/GSD/EVR for back pressure; Drastar high flow & UHP regulators upstream.

Laser Industry

Challenge: resonator gas blends (CO₂/N₂/He), assist gas transients, vacuum resonators
Fit: Fusion Flow gas mixers + Alicat MFCs for accurate blends; Drastar UHP & changeover for uninterrupted purity; Equilibar EVR for vacuum stability in resonators/beam lines.

Vacuum

Challenge: accurate mass flow at low absolute pressure; avoiding backstreaming; precise vacuum control.
Fit: Alicat MCV/PC for leak tight, fast control; Equilibar EVR for frictionless vacuum regulation; Drastar UHP to keep MFC inlets stable