Nanotechnology Gas & Pressure Measurement & Control (UK)
Why precise gas & pressure control matters in nanotechnology
From ALD/CVD thin‑film growth and graphene/2D materials to RIE/etch and nanoparticle synthesis, nanotechnology workflows depend on repeatable gas delivery and stable pressure at ultra‑low flows—often under vacuum and with pulsed steps lasting milliseconds. Small deviations can shift stoichiometry, change grain size, or cause non‑uniform layers across wafers or chips—directly impacting yield and device performance.
Premier Control Technologies supports research labs, universities, pilot lines and fabs across the UK with application engineering, rapid supply and service for Alicat Scientific mass flow and pressure instruments, as well as Equilibar precision back pressure regulators.
Common gas & pressure challenges we see in nanotechnology
1. Ultra low flow accuracy and stability
ALD precursors and carrier gases frequently run in the sccm to sub sccm regime. Maintaining setpoint at these flows—despite temperature or downstream pressure changes—is critical for cycle to cycle repeatability.
2. Fast, repeatable pulsing for ALD/PEALD
Processes require rapid step changes and short pulses; controllers must settle quickly without overshoot to avoid parasitic reactions or non uniform monolayers.
3. Multi gas flexibility and recipe changes
R&D tools often switch between N₂, Ar, O₂, H₂ and specialty/reactive gases. Changing mixes and ranges without re plumbing or lengthy recalibrations saves precious tool time.
4. Pressure transients in vacuum systems
Roughing/pumping events and fast valve actuations cause back pressure fluctuations that disrupt mass flow accuracy and film uniformity unless actively controlled.
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5. Contamination & materials compatibility
Cleanroom environments demand low outgassing, high leak integrity and wetted materials compatible with reactive or corrosive gases.
6. Data acquisition & tool integration
Researchers need high rate digital data, totalisation, and straightforward integration with PLCs, LabVIEW, Python or MATLAB to accelerate experiments.
How Alicat devices address these issues
Alicat differential pressure mass flow controllers (MFCs/MFMs)
Alicat’s laminar differential pressure technology with integrated temperature/pressure sensing delivers fast control response and wide turndown suited to nanotech applications.
- Ultra low flow control: Stable control from sub sccm upwards helps maintain film growth per cycle and prevents starvation during precursor dosing.
- Fast, repeatable pulsing: Millisecond class control dynamics support ALD/PEALD timing without overshoot, improving within wafer uniformity.
- Multi gas, multi range flexibility: Onboard gas libraries and user selectable ranges allow quick switchovers between process recipes without sending instruments away for reconfiguration or recalibration.
- Pressure insensitive mass flow: Built in absolute/relative pressure measurement helps maintain accurate mass flow across changing back pressures typical of vacuum tools.
- Clean construction & leak integrity: Stainless steel wetted paths, elastomer and metal seal options, and low internal volumes help reduce contamination risk.
- Data & connectivity: Analog (0–5 V, 4–20 mA) and digital (e.g., RS 232/Modbus) communications, onboard totalizers and high rate data streaming simplify integration and traceability.
Alicat pressure controllers (PC/PCS series)
For direct chamber or line pressure control, Alicat pressure controllers maintain a stable setpoint from vacuum through positive pressure, coordinating seamlessly with mass flow controllers to keep flow/pressure coupling in check during recipe transitions.
Equilibar® back pressure regulators (BPRs): rock steady downstream control
Where extremely stable downstream pressure is required—especially at very low flows, mixed phases, or with aggressive chemistries—Equilibar BPRs provide exceptional resolution and responsiveness. Their multi orifice diaphragm design maintains setpoint with minimal hysteresis, making them ideal in:
- ALD exhaust and purge lines to stabilize chamber back pressure across pulsing and pump down events.
- Microreactors and nanoparticle synthesis, where tiny flow/pressure swings change nucleation and particle size distribution.
- Two phase or condensable streams where traditional spring loaded regulators struggle.
Alicat + Equilibar synergy
Pair an Alicat electronic pressure controller as the pilot with an Equilibar dome loaded BPR to achieve high bandwidth, high resolution back pressure control from deep vacuum to positive pressure. This combo damps transients, improves ALD/CVD repeatability and protects delicate substrates by avoiding pressure spikes.
Typical nanotechnology use cases we support in the UK
- ALD/PEALD precursor dosing: Sub sccm pulse control with stable back pressure for conformal films in high aspect ratio features.
- CVD/graphene/2D materials: Multi gas blending with rapid ramp/soak transitions while keeping chamber pressure constant.
- RIE/etch: Accurate reactive gas delivery with minimal overshoot for tight CD control.
- Microfluidics & nanoparticle synthesis: Ultra low, steady flows and precise back pressure to tune residence time and particle size.
Common Customer Questions
Alicat's laminar differential pressure sensing with fast control valves and real time temperature/pressure compensation minimizes drift and improves low flow stability under vacuum or changing back pressure.
Yes-Alicat’s multi gas, multi range functionality lets you change gases and adjust ranges on the instrument, ideal for R&D and multi recipe tools.
Use an Equilibar BPR when you need very stable downstream pressure at very low flows, pulsed operation, or two phase/condensable streams—common in ALD exhaust control and nanoparticle synthesis loops.
Alicat supports common analog and digital protocols and provides high rate data/totalization for recipe verification and audit trails.
Yes—our Hethel based team supports specification as well as ongoing optimization across the UK.
Why work with Premier Control Technologies (UK)
- UK Partner for Alicat Scientific with local stock options, application support and rapid turnaround.
- Equilibar BPR expertise—application sizing and pilot control strategies for demanding low flow regimes.
- Cleanroom aware advice on materials, leak integrity and installation to protect tool uptime and yield.
- UK support from Hethel (Norfolk) covering universities, Catapults, start ups and fabs nationwide.
Tell us about your process (ALD, CVD, RIE, microreactor) and target flow/pressure ranges. We'll size an Alicat MFC/PC and, where needed, an Equilibar BPR for a stable, scalable solution. Please email us at sales@pctflow.com or call 01953 609930.
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