Semiconductor
Processes commonly being supported by Alicat instruments include:
- Atomic Layer (ALD)
- Chemical Vapour Deposition (CVD)
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Deep Reactive Ion Etching (DRIE)
Customers purchase these products
Alicat MB - Portable Gas Mass Flow Meter
Alicat MCE - SEMI Standard Gas Mass Flow Controller
Alicat MC - Gas Mass Flow Controller
Alicat MCV - Vacuum Gas Mass Flow Controller
Alicat PC3 PCR3 - Single Valve Pressure Controller
Alicat PCR - Single Valve Pressure Controller
Alicat PC - Differential Pressure Controller
Drastar 2200 Series
Drastar DRA100 Series
Drastar DRA200 Series
Drastar DRA500 Series
