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Semiconductor

Processes commonly being supported by Alicat instruments include:

  • Atomic Layer (ALD)
  • Chemical Vapour Deposition (CVD)
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)
  • Deep Reactive Ion Etching (DRIE)

Customers purchase these products

Alicat MB Series of Portable Gas Mass Flow Meters Alicat MB Series Meter - Portable Alicat MCE - SEMI Standard Gas Mass Flow Controller Alicat MCE Series Controller - SEMI Standard Alicat MC - Gas Mass Flow Controller Alicat MC Series Controller - Standard Controller Alicat MCV - Vacuum Gas Mass Flow Controller Alicat MCV Series Controller - Vacuum Applications Alicat PC3 PCR3 - Single Valve Pressure Controller Alicat PC3 PCR3 - Single Valve Pressure Controller Alicat PCR - Single Valve Pressure Controller - Differential control Alicat PCR - Single Valve Pressure Controller Alicat PC - Pressure Controller Alicat PC - Pressure Controller Drastar 2200 Series pressure regulator Drastar 2200 Series Drastar DRA100 Series pressure regulator with gauges Drastar DRA100 Series Drastar DRA200 Series pressure regulator Drastar DRA200 Series Drastar DRA500 Series pressure regulator Drastar DRA500 Series Drastar DRA700 Series pressure regulator Drastar DRA700 Series Line Tech Digital Thermal Mass Flow Controller - MD500C Line Tech Digital Thermal Mass Flow Controllers Line Tech Analog Thermal Mass Flow Controller - MS3500VA Line Tech Analog Thermal Mass Flow Controllers Line Tech Digital Thermal Mass Flow Meter - MD500M Line Tech Digital Thermal Mass Flow Meters Line Tech Analog Thermal Mass Flow Meter - MS2500VA Line Tech Analog Thermal Mass Flow Meters