Semiconductor
Processes commonly being supported by Alicat instruments include:
- Atomic Layer (ALD)
- Chemical Vapour Deposition (CVD)
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Deep Reactive Ion Etching (DRIE)
Customers purchase these products
Alicat MB Series Portable Mass Flow Meter
Alicat MCE SEMI Standard Series Mass Flow Controller
Alicat MC Series Mass Flow Controller
Alicat MCV Vacuum Series Mass Flow Controller
Alicat PC3 PCR3 Series Single Valve Pressure Controller
Alicat PCR Series Single Valve Pressure Controller
