Semiconductor
Processes commonly being supported by Alicat instruments include:
- Atomic Layer (ALD)
- Chemical Vapour Deposition (CVD)
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Deep Reactive Ion Etching (DRIE)
Customers purchase these products
Alicat MB - Portable Gas Mass Flow Meters
Alicat MCE - SEMI Standard Gas Mass Flow Controllers
Alicat MC - Gas Mass Flow Controllers
Alicat MCV - Vacuum Gas Mass Flow Controllers
Alicat PC3 PCR3 - Single Valve Pressure Controllers
Alicat PCR - Single Valve Pressure Controllers
Alicat PC - Differential Pressure Controllers
Drastar 2200 Series
Drastar DRA100 Series
