Semiconductor
Processes commonly being supported by Alicat instruments include:
- Atomic Layer (ALD)
- Chemical Vapour Deposition (CVD)
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Deep Reactive Ion Etching (DRIE)
Customers purchase these products
Alicat MB - Portable Gas Mass Flow Meter
Alicat MCE - SEMI Standard Gas Mass Flow Controller
Alicat MC - Gas Mass Flow Controller
Alicat MCV - Vacuum Gas Mass Flow Controller
Alicat PC3 PCR3 - Single Valve Pressure Controller
Alicat PCR - Single Valve Pressure Controller
Alicat PC - Pressure Controller
Drastar 2200 Series
Drastar DRA100 Series
Drastar DRA200 Series
Drastar DRA500 Series
Drastar DRA700 Series
Line Tech Digital Thermal Mass Flow Controllers
Line Tech Analog Thermal Mass Flow Controllers
Line Tech Digital Thermal Mass Flow Meters
