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Premier Control Technologies Fluid Solutions

Vacuum

Precision Flow & Pressure Solutions for Vacuum Processes (UK)

Common Problems in Vacuum Systems

Vacuum coating, ALD/CVD, and research chambers demand stable gas flow and pressure control under extreme conditions. Typical issues include:

  • Flow instability at low pressures: Conventional MFCs struggle to maintain accuracy when upstream pressure drops during pump downs.
  • Overshoot during recipe changes: Slow response times cause pressure spikes, risking contamination or film defects.
  • Leak integrity concerns: Backstreaming through controllers compromises vacuum purity.
  • Pressure drift from supply regulators: Inconsistent inlet pressure reduces MFC accuracy and repeatability

Typical applications

Alicat — Correcting Flow & Pressure Challenges

Why Alicat is ideal for vacuum applications:

  • MCV Vacuum Mass Flow Controllers
    • Positive shut off (≤1×10⁻⁹ atm cc/s He) prevents backstreaming and protects chamber integrity.
    • VCR® fittings and helium tight seals ensure leak free operation.
    • Ultra fast response (50–100ms) eliminates overshoot during pulsing or recipe transitions.
  • Whisper Series (MCW)
    • Ultra low pressure drop for sensitive vacuum systems where upstream pressure is limited.
  • Pressure Controllers (PC/PCS)
    • Maintain stable chamber or line pressure during pump downs and throttle valve changes.
    • Dual valve options decouple flow pressure interactions for precise control.
Pipes and tanks in a dry room
Key benefits:
  • Accurate sub sccm to slpm flow control under vacuum.
  • Faster stabilization improves process yield and reduces downtime.
  • Multi gas capability for CO₂, N₂, He, O₂ without recalibration.

Drastar — UHP Pressure Regulators for Vacuum Systems

Why Drastar stands out:

  • DRA100/DRA200 UHP Regulators
    • 316L stainless steel, electropolished internals, and VCR® connections maintain purity for reactive gases.
    • Low droop performance ensures stable inlet pressure to Alicat MFCs, improving accuracy.
  • Automatic Changeover Systems
    • Provide uninterrupted gas supply during cylinder switchover—critical for vacuum coating lines.
  • High Flow Regulators (DR70/DR90)
    • Handle purge or vent flows for large vacuum chambers.
  • Key benefits:
    • Continuous operation without pressure drift.
    • Compliance with high purity standards for semiconductor and optical fibre processes.
    • Reduced downtime and improved process stability.

Equilibar

EVR Series Features & Benefits

  • Equilibar EVR Series
    Ultra stable vacuum control
    • Maintains precise setpoints with minimal hysteresis, even under varying flow conditions.
    Frictionless diaphragm design
    • Provides fast, repeatable response for central vacuum distribution or exhaust control.
    Wide operating range
    • Handles deep vacuum through positive pressure for flexible process needs.

Other Equilibar Solutions for Vacuum Industry

  • Research Series: Ideal for benchtop vacuum experiments and pilot coating rigs.
  • High Temperature Series: Handles hot zones near deposition chambers.
  • General Service & BD Series: For exhaust and recirculation loops in large vacuum systems.
  • Key benefits:
    • Exceptional resolution at ultra low flows.
    • Compatible with mixed phases and condensable vapors.
    • Improves coating uniformity and process repeatability.

Typical UK Vacuum Applications We Support

  • Vacuum coating & PVD: Alicat MCV + Equilibar EVR for stable flow and back pressure.
  • ALD/CVD processes: Alicat PC + Drastar UHP regulators for precise pressure control.
  • Research chambers: Alicat Whisper MFCs + Equilibar Research Series for ultra low flow stability.

Relevant article for further reading

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