01953 609930Vacuum
Precision Flow & Pressure Solutions for Vacuum Processes (UK)
Common Problems in Vacuum Systems
Vacuum coating, ALD/CVD, and research chambers demand stable gas flow and pressure control under extreme conditions. Typical issues include:
- Flow instability at low pressures: Conventional MFCs struggle to maintain accuracy when upstream pressure drops during pump downs.
- Overshoot during recipe changes: Slow response times cause pressure spikes, risking contamination or film defects.
- Leak integrity concerns: Backstreaming through controllers compromises vacuum purity.
- Pressure drift from supply regulators: Inconsistent inlet pressure reduces MFC accuracy and repeatability
Typical applications
Alicat — Correcting Flow & Pressure Challenges
Why Alicat is ideal for vacuum applications:
- MCV Vacuum Mass Flow Controllers
- Positive shut off (≤1×10⁻⁹ atm cc/s He) prevents backstreaming and protects chamber integrity.
- metal face‑seal fittings and helium tight seals ensure leak free operation.
- Ultra fast response (50–100ms) eliminates overshoot during pulsing or recipe transitions.
- Whisper Series (MCW)
- Ultra low pressure drop for sensitive vacuum systems where upstream pressure is limited.
- Pressure Controllers (PC/PCS)
- Maintain stable chamber or line pressure during pump downs and throttle valve changes.
- Dual valve options decouple flow pressure interactions for precise control.
Key benefits:
- Accurate sub sccm to slpm flow control under vacuum.
- Faster stabilization improves process yield and reduces downtime.
- Multi gas capability for CO₂, N₂, He, O₂ without recalibration.
Drastar — UHP Pressure Regulators for Vacuum Systems
Why Drastar stands out:
- DRA100/DRA200 UHP Regulators
- 316L stainless steel, electropolished internals, and metal face‑seal connections maintain purity for reactive gases.
- Low droop performance ensures stable inlet pressure to Alicat MFCs, improving accuracy.
- Automatic Changeover Systems
- Provide uninterrupted gas supply during cylinder switchover—critical for vacuum coating lines.
- High Flow Regulators (DR70/DR90)
- Handle purge or vent flows for large vacuum chambers.
Key benefits:
- Continuous operation without pressure drift.
- Compliance with high purity standards for semiconductor and optical fibre processes.
- Reduced downtime and improved process stability.
Equilibar
EVR Series Features & Benefits
- Equilibar EVR Series
Ultra stable vacuum control
- Maintains precise setpoints with minimal hysteresis, even under varying flow conditions.
Frictionless diaphragm design
- Provides fast, repeatable response for central vacuum distribution or exhaust control.
Wide operating range
- Handles deep vacuum through positive pressure for flexible process needs.
Other Equilibar Solutions for Vacuum Industry
- Research Series: Ideal for benchtop vacuum experiments and pilot coating rigs.
- High Temperature Series: Handles hot zones near deposition chambers.
- General Service & BD Series: For exhaust and recirculation loops in large vacuum systems.
Key benefits:
- Exceptional resolution at ultra low flows.
- Compatible with mixed phases and condensable vapors.
- Improves coating uniformity and process repeatability.
Typical UK Vacuum Applications We Support
- Vacuum coating & PVD: Alicat MCV + Equilibar EVR for stable flow and back pressure.
- ALD/CVD processes: Alicat PC + Drastar UHP regulators for precise pressure control.
- Research chambers: Alicat Whisper MFCs + Equilibar Research Series for ultra low flow stability.
Relevant article for further reading
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