Premier Control Technologies Fluid Solutions
Delivery of purge and reactive gases into a vacuum coating system requires fast response and precise control. Alicat mass flow controllers and pressure controllers offer fast control response speeds and EtherCAT communications. Onboard EtherCAT eliminates the need for EtherCAT translators and makes for easy integration into industrial PLC networks.
Drop-in replacements for aging mass flow controllers. Upgrading to an Alicat mass flow controller is easy. The MCE Series meets the SEMI specification for connection length so it is drop-in compatible with many older MFCs from other manufacturers. The electrical interface can also be matched so pin-outs and format do not need to be of concern. The Alicat MCV is a drop-in replacement for older MFCs equipped with integrated pneumatic shut-off valves.
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