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Alicat MCE - SEMI Standard Gas Mass Flow Controller

  • Conforms to SEMI International Standards
  • 50 – 100 ms control response (adjustable)
  • Drop-in replacement for MKS 1179A flow controllers
  • Up to ±0.4% of reading + 0.2% of full scale accuracy
  • No warm-up time, ready to go in 1 second

Drop-in upgrade for your aging thermal flow controllers

Alicat MCE series mass flow controllers conform to the SEMI international standard and are built with a proportional control valve positioned with the base of the unit. All MCE series controllers come with ¼” VCR connections with full scale flow rates available from 0.5 SCCM up to 20 SLPM. This specification allows you to upgrade and aging or underperforming thermal mass flow controllers. Replacements are easy as they offer the same form, fit and function. We can even match your current pin-output configuration.

All Alicat MCE Series mass flow controllers allow you to control your mass flow, volumetric flow or pressure with one single device. Every MCE series mass flow controller is repeatable and accurate with calibrations available up to ±(0.4% of reading + 0.2% full scale) accuracy.

MSE series controllers features a 200:1 turndown ratio and offers a maximum line pressure rating of 145 PSIG.

The mass flow controller can be used as a standalone controller with the use of local display and push button keypad. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature) as well as control the flow or pressure of the gas. The display may also be upgraded to a colour TFT.

RS-232 communications are standard along with an analogue output signal such as 0-5 Vdc. MCE series controllers can also support Modbus-RTU, available over RS-232 or RS-485 and PROFIBUS protocols.

Every Alicat device is backed by the manufactures limited life time warranty and ships with a NIST traceable calibration certificate.

MCE mass flow controllers are also available in on 316L stainless steel constructions for use with corrosive and aggressive applications (MCES Series). MCE is also available with the Precision Dispensing Package which relies on the fast control valves to accurately dispense metered amounts of gas.

MCE is a drop-in replacement for an MKS 1179A mass flow controller and other similar mass flow controllers.

Mass flow controllers to replace MKS 1179A and 2179A mass flow controllers


Common process applications and industrial uses include:

  • Semiconductor

Other features

  • CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C

Model numbers

  • MCE-0.5SCCM-D
  • MCE-10SCCM-D
  • MCE-20SCCM-D
  • MCE-50SCCM-D
  • MCE-100SCCM-D
  • MCE-200SCCM-D
  • MCE-500SCCM-D
  • MCE-10SLPM-D
  • MCE-20SLPM-D


The Alicat MCE - SEMI Standard Gas Mass Flow Controller is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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