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Alicat MCS - Anti Corrosive Gas Mass Flow Controller

  • All 316L Stainless Steel wetted parts
  • Flows from 0.5 SCCM up to 3000 SLPM
  • 130 Preloaded Gases and Gas Mixtures
  • 50 – 100 ms control response
  • Up to ±0.4% of reading +0.2% of full scale accuracy

Responsive flow control for corrosive gas applications

The Alicat MCS range of anti-corrosive mass flow controllers feature all 316L stainless steel wetted parts, suitable for aggressive gas applications where gases like NH3, SO2, H2S and SiH4 may be present.

The MCS mass flow controller is repeatable and accurate with calibrations up to ±(0.4% of reading +0.2% of full scale) accuracy and each have a 100:1 turndown ratio with full scale flow rates starting from 0.5 SCCM and going up to 5000 SLPM.

The mass flow controller can be used as a standalone controller with the use of local display and push button keypad. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature) as well as control the flow or pressure of the gas.

RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. A colour TFT display is also an option. Other output options and communication protocols are also available.

Every Alicat device is backed by the manufactures limited life time warranty and ships with a NIST traceable calibration certificate.

With ATEX certification available as an option, the meter may be used in ATEX Class 1 Zone 2 environments.

Model numbers

  • MCS-0.5SCCM-D
  • MCS-10SCCM-D
  • MCS-20SCCM-D
  • MCS-50SCCM-D
  • MCS-100SCCM-D
  • MCS-200SCCM-D
  • MCS-500SCCM-D
  • MCS-10SLPM-D
  • MCS-20SLPM-D
  • MCRS-100SLPM-D
  • MCRS-250SLPM-D
  • MCRS-500SLPM-D
  • MCRS-1000SLPM-D
  • MCRS-1500SLPM-D


The Alicat MCS - Anti Corrosive Gas Mass Flow Controller is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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