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Alicat MCV - Vacuum Gas Mass Flow Controller

  • Perfect for Vacuum Applications
  • Positive shut-off valve
  • 50 – 100 ms control response
  • 98+ Preloaded Gases and Gas Mixtures
  • Accessible PID valve tuning

Easy upgrade for aging thermal vacuum flow controllers

The Alicat MCV series mass flow controller is ideal for vacuum applications that require a tight seal. An integrated pneumatically actuated positive shut-off valve is normally closed which provides shut-off of 1 x 10-9 atm scc/sec Helium max. When opened, mass flow is then controlled via the built in proportional control valve positioned within the base of the meter. All MCV series mass flow controllers come with ¼” VCR connections with full scale flow rates available from 0.5 SCCM up to 20 SLPM.

All Alicat MCV Series mass flow controllers allow you to control your gas via mass flow, volumetric flow or pressure with one single device. Every MCV series mass flow controller is repeatable and accurate with calibrations available up to ±0.4% of reading +0.2% of full scale) accuracy.

Every MCV controller features a 200:1 turndown ratio and offers a maximum line pressure rating of 145 PSIG.

The mass flow controller can be used as a standalone controller with the use of local display and push button keypad. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature) as well as control the flow or pressure of the gas.

RS-232 communications are standard along with an analogue output signal such as 0-5 Vdc.

MCV mass flow controllers are also available in on 316L stainless steel constructions for use with corrosive and aggressive applications (MCVS Series). The MCV is also available with the Precision Dispensing Package which relies on the fast control valves to accurately dispense metered amounts of gas. MCV Controllers have no warm up time, they are operational within 1 second.

The MCV is a drop-in replacement for an MKS 2179A and other similar mass flow controllers.

Mass flow controllers to replace MKS 1179A and 2179A mass flow controllers


Common process applications and industrial uses include:

  • Vacuum mass flow controller

Model numbers

  • MCV-0.5SCCM-D
  • MCV-10SCCM-D
  • MCV-20SCCM-D
  • MCV-50SCCM-D
  • MCV-100SCCM-D
  • MCV-200SCCM-D
  • MCV-500SCCM-D
  • MCV-10SLPM-D
  • MCV-20SLPM-D


The Alicat MCV - Vacuum Gas Mass Flow Controller is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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