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Flow, pressure, level and temperature solutions

Alicat MCV Vacuum Series Mass Flow Controller

Alicat MCV Vacuum Series Mass Flow Controller for use with Gases

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  • Perfect for Vacuum Applications
  • Positive shut-off valve
  • 50 – 100 ms control response
  • 98 Preloaded Gases and Gas Mixtures
  • Accessible PID valve tuning

The Alicat MCV series mass flow controller is ideal for vacuum applications that require a tight shut-off. An integrated pneumatically actuated positive shut-off valve is normally closed which provides shut-off of 1 x 10-9 atm scc/sec Helium max. When opened, mass flow is then controlled via the built in proportional control valve positioned within the base of the meter. All MCV series mass flow controllers come with ¼” VCR connections with full scale flow rates available from 0.5 SCCM up to 20 SLPM.

All Alicat MCV Series mass flow controllers allow you to control your gas via mass flow, volumetric flow or pressure with one single device. Every MCV series mass flow controller is repeatable and accurate with calibrations available up to +/- 0.4% of reading accuracy.

Every MCV controller features a 200:1 turndown ratio and offers a maximum line pressure rating of 145 PSIG.

The mass flow controller can be used as a standalone controller with the use of local display and push button keypad. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature) as well as control the flow or pressure of the gas.

RS-232 communications are standard as well as an analogue output signal such as 0 – 5 VDC.

Every Alicat device is backed by the manufactures limited life time warranty and ships with a NIST traceable calibration certificate.

MCV mass flow controllers are also available in on 316L stainless steel constructions for use with corrosive and aggressive applications (MCVS Series). The MCV is also available with the Precision Dispensing Package which relies on the fast control valves to accurately dispense metered amounts of gas. MCV Controllers have no warm up time, they are operational within 1 second.

The MCV is a drop-in replacement for a MKS 2179A and other similar mass flow controllers.


  • Vacuum mass flow controller

Model numbers

  • MCV-0.5SCCM-D
  • MCV-10SCCM-D
  • MCV-20SCCM-D
  • MCV-50SCCM-D
  • MCV-100SCCM-D
  • MCV-200SCCM-D
  • MCV-500SCCM-D
  • MCV-10SLPM-D
  • MCV-20SLPM-D