Alicat SFF Series Controller - Vacuum SEMI Standard

The SFF series is a drop-in replacement for use inside vacuum coating systems. They are fully customised to fit the process that it is being used in. Controllers are shipped within 5 business days to ensure minimal downtime of your coater system.

Response time and Accuracy

A response time of as little as 30ms ensures fast control with a standard accuracy of ±0.8% of reading and ±0.2% of full scale. An upgraded controller can be ordered which provides an accuracy of just ±0.4%.

Turndown ratio

Precision across the flow range is given by the large turndown ratio of up to 10,000:1. There is no warmup wait for the device to begin operating as it takes under a second to reach the desired output.

Flow rates

Flow rates vary between devices, ranging from a full scale of 0.5SCCM up to 20SLPM.

Temperature and Pressure ranges

The operating temperature for both ambient and gas should be between –10 and 60°C. Operating pressures of up to 200 PSIA.

Materials and connectors

A range of wetted materials are used during construction including a range of stainless steels, FKM, alumina ceramic, brass, glass as well as others. A range of electrical connectors are available, which can be fitted with matching pinouts to the devices of our competitors for an easy swap.