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Flow, pressure, level and temperature solutions

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Alicat M Series Mass Flow Meter

  • Flows from 0.5 SCCM up to 4000 SLPM
  • 98 Preloaded Gases and Gas Mixtures
  • 5-ms speed of response
  • No warm-up time, ready to go in 1 second

Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!

The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy.

Every Alicat mass flow meter has a 200:1 turndown ratio with flow rates starting from 2.5 microliters per minute up to 4000 SLPM.

The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).

RS-232 communications are standard as well as an analogue output signal such as 0–5 VDC. M series can also offer Modbus-RTU, available over RS-232 or RS-485 and PROFIBUS protocols.

Every Alicat device is backed by the manufacturer's limited life time warranty and ships with a NIST traceable calibration certificate.

M series mass flow meters have a maximum operating pressure of 145 PSIG.


  • Leak checking
  • Flow characterization
  • Calibration standard
  • Verification
Alicat M Series Mass Flow Meter Alicat M Series Mass Flow Meter 4000 SLPM

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