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Alicat M - Gas Mass Flow Meter

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5 - 7 day fast-ship available

  • Flows from 0.5 SCCM up to 5000 SLPM
  • 98+ Preloaded Gases and Gas Mixtures
  • 10,000:1 turndown ratio
  • No warm-up time, ready to go in 1 second
  • ±0.6% of reading accuracy on most devices

Measure Mass Flow, Volumetric Flow, Process Pressure and Temperature - Simultaneously!

Product overview

Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!

The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy.

Every Alicat mass flow meter has a 10000:1 turndown ratio with full scale flow rates starting from 0.5 SCCM per minute up to 5000 SLPM.

The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).

RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. Alicat M series can also be configured to support Industrial Protocols such as DeviceNet, EtherNet/IP, Modbus-TCP/IP and many others.

Every Alicat device is backed by the manufacturer's limited life time warranty and ships with a NIST traceable calibration certificate.

M series mass flow meters have a maximum operating pressure of 145 PSIG.

Key specifications

The data in the table below are standard configurations for models 10 SCCM full scale through 20 SLPM full scale. Please refer to the Mid-flow data sheet for full details.

Mass Flow Accuracy at Calibration Conditions1±0.6% of reading or ±0.1% of full scale, whichever is greater
High Accuracy Option1±0.5% of reading or ±0.1% of full scale, whichever is greater
Bidirectional Option1No additional uncertainties
Repeatability (2σ)±(0.1% of reading + 0.02% of full scale)
Flow Measurement Range0.01–100% of full scale
Temperature SensitivityMass flow zero shift: ±0.01% of full scale per °C from tare temperature
Mass flow span shift: ±0.01% of reading per °C from 25°C
Pressure SensitivityMass flow zero shift: ±0.01% of full scale per atm from tare pressure
Mass flow span shift: ±0.1% of reading per atmosphere from calibration conditions
Operating Temperature Range−10–60°C
Temperature Accuracy±0.75°C
Operating Pressure Full Scale160 PSIA

1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.

Video: Accurate and detailed flow measurements

Fill out the Configurator Form so our engineers can craft the perfect custom solution for you:

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Common process applications and industrial uses include:

  • Leak checking
  • Flow characterization
  • Calibration standard
  • Verification

Other features

  • CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C

Model numbers

  • M-0.5SCCM-D
  • M-1SCCM-D
  • M-2SCCM-D
  • M-5SCCM-D
  • M-10SCCM-D
  • M-20SCCM-D
  • M-50SCCM-D
  • M-100SCCM-D
  • M-200SCCM-D
  • M-500SCCM-D
  • M-1SLPM-D
  • M-2SLPM-D
  • M-5SLPM-D
  • M-10SLPM-D
  • M-20SLPM-D
  • M-50SLPM-D
  • M-100SLPM-D
  • M-250SLPM-D
  • M-500SLPM-D
  • M-1000SLPM-D
  • M-1500SLPM-D
  • M-2000SLPM-D
  • M-3000SLPM-D
  • M-5000SLPM-D


The Alicat M - Gas Mass Flow Meter is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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