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Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!
The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy.
Every Alicat mass flow meter has a 10000:1 turndown ratio with full scale flow rates starting from 0.5 SCCM per minute up to 5000 SLPM.
The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).
RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. Alicat M series can also be configured to support Industrial Protocols such as DeviceNet, EtherNet/IP, Modbus-TCP/IP and many others.
M series mass flow meters have a maximum operating pressure of 145 PSIG.
Every Alicat device is backed by the manufacturer's limited life time warranty and ships with a NIST traceable calibration certificate.
The data in the table below are standard configurations for models 10 SCCM full scale through 20 SLPM full scale. Please refer to the Mid-flow data sheet for full details.
Mass Flow Accuracy at Calibration Conditions1 | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
High Accuracy Option1 | ±0.5% of reading or ±0.1% of full scale, whichever is greater |
Bidirectional Option1 | No additional uncertainties |
Repeatability (2σ) | ±(0.1% of reading + 0.02% of full scale) |
Flow Measurement Range | 0.01–100% of full scale |
Temperature Sensitivity | Mass flow zero shift: ±0.01% of full scale per °C from tare temperature Mass flow span shift: ±0.01% of reading per °C from 25°C |
Pressure Sensitivity | Mass flow zero shift: ±0.01% of full scale per atm from tare pressure Mass flow span shift: ±0.1% of reading per atmosphere from calibration conditions |
Operating Temperature Range | −10–60°C |
Temperature Accuracy | ±0.75°C |
Operating Pressure Full Scale | 160 PSIA |
1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.
Fill out the Configurator Form so our engineers can craft the perfect custom solution for you:
Configure nowCommon process applications and industrial uses include:
The Alicat M - Gas Mass Flow Meter is widely used in the following industries:
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01953 609930
Email us
sales@pctflow.com
We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.
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