Premier Control Technologies

Flow, pressure, level and temperature solutions

Alicat M Series Mass Flow Meter

Alicat M Series Mass Flow Meter Alicat M Series Mass Flow Meter 4000 SLPM

Product enquiry

Please fill out the form below and one of our sales representatives will contact you promptly.

If you wish to discuss your requirements on the phone please call us on +44 (0)1953 609930 or email us at sales@pctflow.com

Share our product

Related products

  • Flows from 0.5 SCCM up to 4000 SLPM
  • 98 Preloaded Gases and Gas Mixtures
  • 5-ms speed of response
  • No warm-up time, ready to go in 1 second

Measure Mass Flow, Volumetric Flow, Process Pressure and Temperature - Simultaneously!

Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!

The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy.

Every Alicat mass flow meter has a 200:1 turndown ratio with flow rates starting from 2.5 microliters per minute up to 4000 SLPM.

The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).

RS-232 communications are standard as well as an analogue output signal such as 0–5 VDC. M series can also offer Modbus-RTU, available over RS-232 or RS-485 and PROFIBUS protocols.

Every Alicat device is backed by the manufacturer's limited life time warranty and ships with a NIST traceable calibration certificate.

M series mass flow meters have a maximum operating pressure of 145 PSIG.


  • Leak checking
  • Flow characterization
  • Calibration standard
  • Verification

Model numbers

  • M-0.5SCCM-D
  • M-1SCCM-D
  • M-2SCCM-D
  • M-5SCCM-D
  • M-10SCCM-D
  • M-20SCCM-D
  • M-50SCCM-D
  • M-100SCCM-D
  • M-200SCCM-D
  • M-500SCCM-D
  • M-1SLPM-D
  • M-2SLPM-D
  • M-5SLPM-D
  • M-10SLPM-D
  • M-20SLPM-D
  • M-50SLPM-D
  • M-100SLPM-D
  • M-250SLPM-D
  • M-500SLPM-D
  • M-1000SLPM-D
  • M-1500SLPM-D
  • M-2000SLPM-D
  • M-3000SLPM-D
  • M-5000SLPM-D