Alicat M Series Mass Flow Meter - Standard Model






We aim to respond within 1 hour
- Flows from 0.5 SCCM up to 5000 SLPM
- 98+ Preloaded Gases and Gas Mixtures
- 10,000:1 turndown ratio
- No warm-up time, ready to go in 1 second
- ±0.6% of reading accuracy on most devices
Measure Mass Flow, Volumetric Flow, Process Pressure and Temperature - Simultaneously!
Product overview
Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!
Accuracy and Turndown ratio
The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy.
Every Alicat mass flow meter has a 10000:1 turndown ratio with full scale flow rates starting from 0.5 SCCM per minute up to 5000 SLPM.
Display
The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).
Communication and connections
RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. Alicat M series can also be configured to support Industrial Protocols such as DeviceNet, EtherNet/IP, Modbus-TCP/IP and many others.
Pressure range
M series mass flow meters have a maximum operating pressure of 145 PSIG.
Limited lifetime warranty
Every Alicat device is backed by the manufacturer's limited life time warranty and ships with a NIST traceable calibration certificate.
Key specifications
The data in the table below are standard configurations for models 10 SCCM full scale through 20 SLPM full scale. Please refer to the Mid-flow data sheet for full details.
| Mass Flow Accuracy at Calibration Conditions1 | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
| High Accuracy Option1 | ±0.5% of reading or ±0.1% of full scale, whichever is greater |
| Bidirectional Option1 | No additional uncertainties |
| Repeatability (2σ) | ±(0.1% of reading + 0.02% of full scale) |
| Flow Measurement Range | 0.01–100% of full scale |
| Temperature Sensitivity | Mass flow zero shift: ±0.01% of full scale per °C from tare temperature Mass flow span shift: ±0.01% of reading per °C from 25°C |
| Pressure Sensitivity | Mass flow zero shift: ±0.01% of full scale per atm from tare pressure Mass flow span shift: ±0.1% of reading per atmosphere from calibration conditions |
| Operating Temperature Range | −10–60°C |
| Temperature Accuracy | ±0.75°C |
| Operating Pressure Full Scale | 160 PSIA |
1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.
Video: Accurate and detailed flow measurements

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Applications
Common process applications and industrial uses include:
- Leak checking
- Flow characterisation
- Calibration standard
- Verification
Other features
- Certification: CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C
Model numbers
- M-0.5SCCM-D
- M-1SCCM-D
- M-2SCCM-D
- M-5SCCM-D
- M-10SCCM-D
- M-20SCCM-D
- M-50SCCM-D
- M-100SCCM-D
- M-200SCCM-D
- M-500SCCM-D
- M-1SLPM-D
- M-2SLPM-D
- M-5SLPM-D
- M-10SLPM-D
- M-20SLPM-D
- M-50SLPM-D
- M-100SLPM-D
- M-250SLPM-D
- M-500SLPM-D
- M-1000SLPM-D
- M-1500SLPM-D
- M-2000SLPM-D
- M-3000SLPM-D
- M-5000SLPM-D
Industries
The Alicat M Series Mass Flow Meter - Standard Model is widely used in the following industries:
Surface Treatment
Speciality Gas Supplier
Welding
Power Generation
Nuclear
Fuel Cell
Biofuel
Pharmaceutical
Biochemistry
Biotechnology
Medical
Hospitals
Analyser Manufacturers
Automotive
Military
Aerospace / Space
Universities
Research Development and Technical Institutes
Oil Gas and Petrochemical Industry
Test and Validation
Fire Testing
Hydrogen Economy
Natural Gas
Marine
Laser Industry
Batteries
Carbon Capture
Fisheries
Related products






- Order online
Customer enquiries
We aim to respond within 1 hour

Call us
01953 609930
Email us
sales@pctflow.com
Data sheets and manuals
- View Brochure
- View Manual
- View high flow specs
- View low flow specs
- View mid flow specs
Alicat recalibration service

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.





