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The Alicat MBS series anti corrosive mass flow meter uses all 316L stainless steel wetted parts allowing it to be used with aggressive gases such as NH3, SO2, H2S and SiH4. The addition of the battery pack allows the meter to operate for up to a maximum of 18 hours with only a 3.5 hour recharge time.
The mass flow meter is repeatable and accurate with calibrations up to ±(0.4% of reading +0.2% full scale) accuracy, and typical meter response times are as little as 10 ms.
Every MBS device has a 100:1 turndown ratio with full scale flow rates available from 0.5 SCCM to 5000 SLPM.
The Alicat MBS series can be used as a standalone meter with the use of backlit LCD and push button keypad, allowing the user to see all 4 variables on one screen (mass flow, volumetric flow, absolute pressure, temperature). RS-232 communications via USB Type B also come as standard.
Every Alicat device is backed by the manufactures limited life time warranty and ships with a NIST traceable calibration certificate.
Alicat MBS series mass flow meters have a maximum operating pressure of 145 PSIG, and they can also be equipped with a flow totaliser allowing you to see on the screen the total flow.
The data in the table below are standard configurations for models 0.5 SCCM full scale through 5000 SLPM full scale. Please refer to the data sheet for full details.
Mass Flow Accuracy at Calibration Conditions1 | ±0.8% of reading and ±0.2% of full scale |
High Accuracy Option1 | ±0.4% of reading and ±0.2% of full scale Available for ranges ≥5 SCCM and ≤500 SLPM |
Bidirectional Option1 | ±0.2% of full scale in addition to base accuracy (above) |
Repeatability (2σ) | ±0.2% of full scale |
Flow Measurement Range | 1–100% of full scale |
Temperature Sensitivity | Mass flow zero shift and span shift: 0.02% of full scale per °C from 25°C |
Pressure Sensitivity | Mass flow zero shift and span shift: ±(0.08% of reading + 0.02% of full scale) per atmosphere from calibration conditions |
Operating Temperature Range | −10–60°C (expanded range available) |
Temperature Accuracy | ±0.75°C |
Operating Pressure Full Scale | 160 PSIA (additional options available) |
1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.
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Email us
sales@pctflow.com
We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.
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