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Premier Control Technologies Flow, pressure, level and temperature solutions

Alicat MQ - High Pressure Gas Mass Flow Meter

  • High pressure (160-320 psia) mass flow meter
  • Measure 4 variables simultaneously
  • Preloaded with 98+ compatible gases and gas mixes
  • ±0.6% of reading accuracy on most devices
  • 200:1 turndown ratio

High-pressure, multivariate flow measurement in real time

The Alicat MQ series of mass flow meter builds on the features of the standard instrument and can be used within higher pressure gas applications, ideal for when line pressures are between 160 and 320 psia (11 - 22 bara).

Flow rates are available ranging from 10 SCCM and going up to 3000 SLPM, combined with a 200:1 turndown ratio.

The mass flow meter is easy to use and is ready from the moment it is powered up (no warm up time) and the local display shows the live flow (mass and volumetric) as well as line pressure and temperature. The push button keypad allows for easy configuration changes such as engineering units.

As standard MQ series mass flow meters ship with an analogue output and RS-232 data communications, optional comms include Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP).

Key specifications

The data in the table below are standard configurations for models 10 sccm full scale through 20 slpm full scale. Please refer to the Mid-flow data sheet for full details.

Mass Flow Accuracy at Calibration Conditions1±0.6% of reading or ±0.1% of full scale, whichever is greater
Bidirectional Option1No additional uncertainties
Repeatability (2σ)±0.1% of full scale
Flow Measurement Range0.01–100% of full scale
Temperature SensitivityMass flow zero shift: ±0.01% of full scale per °C from tare temperature
Mass flow span shift: ±0.01% of reading per °C from 25°C
Pressure SensitivityMass flow zero shift: ±0.01% of full scale per °C from tare temperature, per atm
Mass flow span shift: ±0.01% of reading per °C from 25°C, per atm
Operating Temperature Range−10–60°C
Temperature Accuracy±0.75°C
Operating Pressure Full Scale320 PSIA

1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.


Common process applications and industrial uses include:

  • CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C

Other features

  • Display options include monochrome or color, integrated or panel-mount
  • Process connections include NPT, SAE, AN, BSPP, welded compression or VCR/VCO fittings.

Model numbers

  • MQ-10SCCM-D
  • MQ-20SCCM-D
  • MQ-50SCCM-D
  • MQ-100SCCM-D
  • MQ-200SCCM-D
  • MQ-500SCCM-D
  • MQ-1SLPM-D
  • MQ-2SLPM-D
  • MQ-5SLPM-D
  • MQ-10SLPM-D
  • MQ-20SLPM-D
  • MQ-50SLPM-D
  • MQ-100SLPM-D
  • MQ-250SLPM-D
  • MQ-500SLPM-D
  • MQ-1000SLPM-D
  • MQ-1500SLPM-D
  • MQ-2000SLPM-D
  • MQ-3000SLPM-D


The Alicat MQ - High Pressure Gas Mass Flow Meter is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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