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Premier Control Technologies

Flow, pressure, level and temperature solutions

Alicat MQ - High Pressure Gas Mass Flow Meter

  • High pressure (160-320 psia) mass flow meter
  • Measure 4 variables simultaneously
  • Preloaded with 98+ compatible gases and gas mixes
  • ±0.6% of reading accuracy on most devices
  • 200:1 turndown ratio

High-pressure, multivariate flow measurement in real time

The Alicat MQ series of mass flow meter builds on the features of the standard instrument and can be used within higher pressure gas applications, ideal for when line pressures are between 160 and 320 psia (11 - 22 bara).

Flow rates are available ranging from 10 SCCM and going up to 3000 SLPM, combined with a 200:1 turndown ratio.

The mass flow meter is easy to use and is ready from the moment it is powered up (no warm up time) and the local display shows the live flow (mass and volumetric) as well as line pressure and temperature. The push button keypad allows for easy configuration changes such as engineering units.

As standard MQ series mass flow meters ship with an analogue output and RS-232 data communications, optional comms include Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP).


  • CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C

Other features

  • Display options include monochrome or color, integrated or panel-mount
  • Process connections include NPT, SAE, AN, BSPP, welded compression or VCR/VCO fittings.

Model numbers

  • MQ-10SCCM-D
  • MQ-20SCCM-D
  • MQ-50SCCM-D
  • MQ-100SCCM-D
  • MQ-200SCCM-D
  • MQ-500SCCM-D
  • MQ-1SLPM-D
  • MQ-2SLPM-D
  • MQ-5SLPM-D
  • MQ-10SLPM-D
  • MQ-20SLPM-D
  • MQ-50SLPM-D
  • MQ-100SLPM-D
  • MQ-250SLPM-D
  • MQ-500SLPM-D
  • MQ-1000SLPM-D
  • MQ-1500SLPM-D
  • MQ-2000SLPM-D
  • MQ-3000SLPM-D


Alicat recalibration service

Alicat recalibration service

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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