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Alicat MS - Anti Corrosive Gas Mass Flow Meter

  • All 316L Stainless Steel wetted parts
  • For corrosive and aggressive gases
  • Flows from 0.5 SCCM up to 5000 SLPM
  • 130 Preloaded Gases and Gas Mixtures
  • Up to ± (0.4% of Reading + 0.2% of Full Scale) accuracy

Multivariate Anti-Corrosive Mass Flow Meter for Aggressive Gases

The Alicat MS series anti corrosive mass flow meter uses all 316L stainless steel wetted parts allowing it to be used with aggressive gases such as NH3, SO2, H2S and SiH4.

The mass flow meter is repeatable and accurate with calibrations up to ±(0.4% of reading + 0.2% of full scale) accuracy, typical meter response times are as little as 10 ms and is fully adjustable.

Every MS device has a 100:1 turndown ratio with full scale flow rates available from 0.5 SCCM to 5000 SLPM.

The MS Series mass flow meter can be used as a standalone meter with the use of local display and push button keypad, the local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).

RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. The MS series can also offer a secondary analogue output for flow, pressure or temperature.

Every Alicat device is backed by the manufactures limited life time warranty and ships with a NIST traceable calibration certificate.

Alicat MS series mass flow meters have a maximum operating pressure of 145 PSIG.

Key specifications

The data in the table below are standard configurations for models 0.5 SCCM full scale through 5000 SLPM full scale. Please refer to the PDF data sheet for full details.

Mass Flow Accuracy at Calibration Conditions1±0.8% of reading and ±0.2% of full scale
High Accuracy Option1±0.4% of reading and ±0.2% of full scale
Available for ranges ≥5 SCCM and ≤500 SLPM
Bidirectional Option1±0.2% of full scale in addition to base accuracy (above)
Repeatability (2σ)±0.2% of full scale
Flow Measurement Range1–100% of full scale
Temperature SensitivityMass flow zero shift and span shift: 0.02% of full scale per °C from 25°C
Pressure SensitivityMass flow zero shift and span shift:
±(0.08% of reading + 0.02% of full scale) per atmosphere from calibration conditions
Operating Temperature Range−10–60°C (expanded range available)
Temperature Accuracy±0.75°C
Operating Pressure Full Scale160 PSIA (additional options available)

1 - Stated accuracy is after tare under equilibrium conditions, includes repeatability and linearity.

Other features

  • Atex certification is also available, allowing the meter to be used in ATEX Class 1 Zone 2 environments. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C

Model numbers

  • MS-0.5SCCM-D
  • MS-1SCCM-D
  • MS-2SCCM-D
  • MS-5SCCM-D
  • MS-10SCCM-D
  • MS-20SCCM-D
  • MS-50SCCM-D
  • MS-100SCCM-D
  • MS-200SCCM-D
  • MS-500SCCM-D
  • MS-1SLPM-D
  • MS-2SLPM-D
  • MS-5SLPM-D
  • MS-10SLPM-D
  • MS-20SLPM-D
  • MS-50SLPM-D
  • MS-100SLPM-D
  • MS-250SLPM-D
  • MS-500SLPM-D
  • MS-1000SLPM-D
  • MS-1500SLPM-D
  • MS-2000SLPM-D
  • MS-3000SLPM-D
  • MS-5000SLPM-D


The Alicat MS - Anti Corrosive Gas Mass Flow Meter is widely used in the following industries:

Alicat recalibration service

Alicat Calibration and Service Centre

We provide a certified annual recalibration service on all Alicat mass flow meters and mass flow controllers. Further details on our recalibration service.

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