In-Line Filter accessory

To help maintain accuracy of your Alicat flow meter and controller we would recommend that there is adequate filtering to avoid contamination to the measurement head of the instrument. The maximum particulate sizes are as follows:

Max particulate size of 5 microns for units with full-scale flow ranges of 0-1 sccm or less.
Max particulate size of 20 microns for units with full-scale flow ranges between 0-2 sccm and 0-1 slpm.
Max particulate size of 50 microns for units with full-scale flow ranges of 0-1 slpm or more.

The following in-line sintered filters which are designed to work with our flow meters and controllers

#10-32 UNF In-Line Filters
For our micro flow mass flow meters and controllers with a full scale range of 0-50sccm or less (0-20sccm or less for Whisper units) we can supply a filter that directly screws into the #10-32 UNF threaded inlet process connection on the flow meter or controller. The filter is non removable and is available under the following part numbers

• Part number 510053: 5 micron, recommended for our 0-0.5 sccm and 0-1 sccm mass flow meters and controllers
• Part number 510054: 20 micron, recommended for our 0-2 sccm through 0-50 sccm mass flow meters and controllers

If using a #10-32 UNF to 1/8”NPT adaptor with your instrument, use a #10-32 in-line filter between the flow body and adaptor instead of a 1/8”NPT inline filter before the adaptor.

ILF Series In-Line Filters
The ILF series of in line filters feature replaceable filter elements that can be easily replaced by the user. Available in various sizes ranging from 1/8” to ¾” they can be used on our mass flow instruments with a full scale range of 0-100sccm or greater (0-50sccm or greater for Whisper units). They screw directly into the threded inlet process connection on the flow meter or controller.
The filters are available under the following part numbers:

• Part number ILF-1/8-20: 1/8" NPT, 20 micron, fits our 0-100 sccm through 0-20 slpm mass flow meters and controllers
• Part number ILF-1/4-40: 1/4" NPT, 40 micron, fits our 0-50 slpm through 0-100 slpm mass flow meters and controllers
• Part number ILF-1/2-40: 1/2" NPT, 40 micron, fits our 0-250 slpm mass flow meters and controllers
• Part number ILF-3/4-40: 3/4" NPT, 40 micron, fits our 0-500 slpm through 0-2000 slpm mass flow meters and controllers

ILF Series In-Line Filter Elements
The ILF Series of in line filters has replaceable sintered filter elements. Each filter kit includes new ‘O’ rings and a new filter element. They are available under the following part numbers:

• Part number ILFE20: 20 micron, fits 1/8" NPT 20-micron filters (Fits Part Number ILF-1/8-20)
• Part number ILFE40: 40 micron, fits 1/4" NPT 40-micron filters (Fits Part Number ILF-1/4-40)
• Part number ILFE40L: 40 micron, fits 1/2" and 3/4" NPT 40-micron filters (Fits Part numbers ILF-1/2-40 and ILF-3/4-40)