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Line Tech Analog Thermal Mass Flow Meters

High quality Analog Thermal Mass Flow Meters ideal for operation within the Vacuum Industry or where the materials compatibility, such as within the Semiconductor Industry, requires 316L stainless steel throughout. The Line-tech analogue mass flow meter range is designed to be durable and easy to maintain as required within such applications as optical-fibre production and leak detection.


  • Highly accurate at low flow
  • Highly stable and fast response sensor
  • High corrosion resistance
  • Excellent linearity
  • Excellent long-term stability
  • High operating pressure up to 1300 psia (90 Bar A)


  • Full Scale availability of 0.01 to 30 SLPM, 30 to 100 SLPM, 100 to 300 SLPM, 300 to 1000 SLPM and 1000 to 2000 SLPM across five body sizes.
  • Highly accurate at +/-1% FS with repeatability of +/-0.25%.
  • Meters can operate in temperatures between 0 and 50°C.
  • The pressure rating is 1300psia (90 Bar A).
  • Input and output signals are 0-5 Vdc or 4-20 mA.
  • Power Supply requirements are +15 or +24 VDC single rail.

Data sheets and manuals

Model numbers

  • M2030VA
  • M2100VA
  • M2300VA
  • M2500VA
  • M2600VA


The Line Tech Analog Thermal Mass Flow Meters is widely used in the following industries:

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