Alicat IVC Series – Integrated Vacuum Sensor pressure controllers

We aim to respond within 1 hour

All‑in‑one vacuum control: integrated vacuum sensor, PID control and valve—no separate gauge or throttle valve required.
Vacuum ranges: 10 / 100 / 1000 TorrA; optional 1000 & 10 TorrA dual‑sensor package for extended coverage.
Fast response & stability: typical control response ≥ 50 ms (adjustable); 0.1–100% FS steady‑state control.
Absolute pressure accuracy: ± 0.5% of full scale at calibration conditions; 2 ms sensor update.

Alicat IVC Series – Integrated Vacuum Sensor pressure controllers

Fast, stable vacuum control with an onboard vacuum sensor and single control valve in one compact instrument. The IVC Series regulates absolute pressure in pumped vacuum processes across 10, 100, and 1000 TorrA ranges (plus a dual‑sensor option for 1000 & 10 TorrA), with industry‑standard analog/digital I/O for easy PLC/SCADA integration.

The Alicat IVC Series is built for sub‑atmospheric absolute pressure control in vacuum chambers and pumped systems. By integrating the vacuum sensor, proportional control valve, and PID algorithm in a single device, IVC removes the need for a separate capacitance gauge and external throttle valve—simplifying builds and improving loop stability. For applications that prefer a capacitance‑gauge style sensor, the IVC family supports inline or isolated (separately ported) vacuum sensors, and is offered with an IVC3 option that adds an optional remote vacuum sensor port for measuring at a different point in the system while the valve controls elsewhere.

On the instrument, the back‑lit LCD/TFT displays setpoint and measured TorrA values, while front‑panel keys allow local taring, setpoint edits and menu navigation. Integration is straightforward via 12–30 Vdc power and common connector choices (DB‑9/DB‑15, mini‑DIN, M12, locking circular).

Technologies & features

Integrated vacuum sensing

Absolute pressure measurement in TorrA with ± 0.5% FS accuracy at calibration conditions.
2 ms sensor response; 0.01% FS/°C zero/span temperature coefficients.

Closed‑loop vacuum control

Single, normally‑closed proportional valve; steady‑state control 0.1–100% FS; ≥ 50 ms adjustable loop response.

Sensor configurations

Single‑sensor models: 10 / 100 / 1000 TorrA.
Dual‑sensor model (1000 & 10 TorrA) for wide‑range control in one device.
IVC3 variants with optional remote vacuum sensor port.

I/O & communications

Analog: 4–20 mA, 0–5 V, 1–5 V, 0–10 V (1 kHz analog update).
Digital: RS‑232 (default) / RS‑485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS (40 Hz serial update @ 19,200 baud).

Mechanical & materials

Non‑corrosive gases compatibility; IP40 ingress protection; 0–80% RH (non‑condensing).
Wetted materials include stainless steels (302/303/304/430FR), brass, FKM, alumina.
Common process connections: SAE J1926, with options for compression, VCR®/VCO®, NPT, BSPP.

Industries & applications

Vacuum coating & surface engineering (PVD/CVD, plasma processes): stable chamber pressure during deposition and etch steps.
Analytical instruments & R&D: chamber/backfill control for spectrometry, microscopy and materials research labs.
Semiconductor & thin‑film: pumped vacuum processes where fast control and compact footprint simplify tool integration.
Leak testing & environmental sampling: precise absolute pressure control in test stands and vacuum sampling systems.

Need help?

If you need help completing the form, please feel free to contact the team directly

Other features

Local/remote control: panel setpoint entry, or remote setpoint via analog/digital comms.
Optional remote sense (IVC3): measure vacuum at the chamber while controlling upstream—ideal for long runs or sensitive volumes.
Flexible porting and connector options for drop‑in retrofit on existing rigs.
Tutorial & quick‑start resources available for commissioning and configuration.