- Metal‑seal architecture with SEMI F36‑compatible footprint
- Ultra‑low external leak: < 1×10⁻¹⁰ atm‑cc/s He
- Fast, stable control: typical response as fast as 30 ms
- Corrosive‑gas compatible: limit wetted materials to 316L SS plus PCTFE / FFKM / EPDM
PCX Series pressure controllers bring Alicat’s fast, repeatable control to applications that demand metal‑sealed interfaces and a minimal wetted material set. Each device integrates a high‑speed pressure sensor (sub‑millisecond update), a proportional control valve (low‑ or high‑flow trims), and a multivariate display/touchpad for local setpoint entry. The metal‑seal design and SEMI F36 footprint make PCX a natural choice for fab tools, vacuum systems and any process where leak integrity, cleanliness and retro‑fitability matter.
Under the hood, PCX couples < 1 ms sensor response with as‑fast‑as‑30 ms closed‑loop control, with user‑tunable PID to balance speed and stability for your exact volume, plumbing and valve size. Accuracy is ±0.25% FS as standard or ±0.125% FS with the high‑accuracy option; repeatability is ±0.025% FS (2σ). Warm‑up is typically < 1 s, so instruments come to spec almost immediately on power‑up.
For integration, PCX supports multiple industrial protocols (from classic analog 4–20 mA / 0-5 VDC / 0–10 VDC to EtherNet/IP, EtherCAT, PROFINET, PROFIBUS, Modbus TCP/IP, DeviceNet and IO‑Link) and ships with a compact 24 Vdc power requirement. Interfaces include DB‑9, DB‑15, mini‑DIN, locking circular and M12 options for quick panel wiring.
Key features & technologies
Sealing, materials & integrity
- Metal‑seal process connections; SEMI F36 footprint across flow sizes.
- Limit wetted materials to 316L SS + PCTFE / FFKM / EPDM to align with media compatibility and outgassing needs.
- External leak: < 1×10⁻¹⁰ atm‑cc/s He. Through‑valve leak at zero setpoint: down to < 1×10⁻⁵ atm‑cc/s He (valve‑dependent).
Measurement & control
- Ranges: 500 TorrA → 100 PSIA absolute. Control turndown 10,000:1 (0.01–100% FS).
- Accuracy: ±0.25% FS standard; ±0.125% FS high‑accuracy option. Repeatability: ±0.025% FS (2σ).
- Response: sensor < 1 ms; typical control as fast as 30 ms (valve/flow dependent). Warm‑up < 1 s.
I/O & communications
- Digital: RS‑232/485 (Modbus RTU), Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFINET, PROFIBUS, IO‑Link. 40 Hz update at 19,200 baud (serial).
- Analog: 4–20 mA, 0–5 V, 1–5 V, 0–10 V with 1 kHz update; ±0.1% FS signal accuracy (additive).
- Display/UI: monochrome LCD or color TFT with touchpad; 10 Hz display updates.
Mechanical & installation
- Valve options: K0XXM (low‑flow NC) and B0XXM (high‑flow NC). Weight from ≈1.1–1.8 kg
- Ingress/IP: IP40; 0–95% RH (non‑condensing); –20 to +85 °C operation.
- Orientation sensitivity: none; M4 mounting holes; SEMI F36 footprint for quick swap‑out
Where PCX is a great fit (industries & applications)
- Semiconductor & vacuum – vacuum chambers, CVD/PVD and process gas delivery where metal seals and SEMI footprints are expected.
- Analytical & R&D labs – stable absolute pressure in gas manifolds and reference volumes with fast step response for repeatable methods.
- Hydrogen & energy – high‑purity gas handling, fuel‑cell test stands and electrolyser support where leak integrity is critical.
- Aerospace & advanced manufacturing – pressure control in leak‑test rigs, component proving and controlled‑environment processes.
Model options & selection notes
- Valve trim: choose K0XXM (low‑flow) or B0XXM (high‑flow) to match your expected flow/volume; both are normally‑closed.
- Wetted set: specify 316L + PCTFE / FFKM / EPDM per gas compatibility. For highly aggressive media, consult PCT for alternative Alicat lines.
Why PCX vs standard PC controllers?
PCX adds metal‑seal interfaces, SEMI footprinting and industry‑leading leak integrity while retaining Alicat’s hallmark speed, wide turndown and rich communications—ideal when cleanliness, compatibility and retrofit speed are as important as control performance.
Get help sizing a PCX
Tell us your media, pressure range, connection standard, protocol and whether your volume is flowing or closed—we’ll configure the valve trim, accuracy and I/O for a perfect fit.
Need help?
If you need help completing the form, please feel free to contact the team directly
Model numbers
- K0XPM
- K0XKM
- K0XEM
- B0XPM
- B0XKM
- B0XEM
The Alicat PCX Series Pressure Controller is widely used in the following industries: